Sensorless XY Scanning Mechanism for Precision Applications: A comprehensive guide to XY Flexural Mechanism - Softcover

Mulik, Sharad; Deshmukh, Suhas; Shewale, Mahesh

Softcover

ISBN 10: 6202518774 ISBN 13: 9786202518772

Verlag: LAP LAMBERT Academic Publishing, 2020

Inhaltsangabe

Micro and Nano positioning systems demands high order of precision and repeatability. Positioning accuracy depends on resolution of positioning sensor. Present aim of work is to demonstrate theoretically and experimentally the novel concept of sensor-less operation of scanning mechanism which eliminates the high cost sensor from feedback control loop. Experimental setup (consists XY flexural mechanism, voice coil motors, current and voltage sensing circuitry, position estimator algorithm, Microcontroller) is developed, and its system identification is conducted using highly accurate optical encoder (resolution 50 nm via due experimentation. Position estimator algorithm is developed and experimentally tested, and its accuracy is validated with due experimentation. It is observed that positioning accuracy of less than 5 microns is achieved. PID control is designed and experimentally implemented and real-time scanning accuracy of less than 5 microns is achieved at scanning speed of 10 mm/s.

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Über die Autorin bzw. den Autor

Dr. Sharad Mulik is a Professor in Department of Mechanical Engineering at Sinhgad Technical Education Society's RMD Sinhgad School of Engineering, Pune, Maharashtra, India. Having 24 years of academic experience, his fields of interest are Flexural Mechanisms, Mechatronics, and Controller integration with mechanical systems.

Details zur Ausgabe

• Verlag: LAP LAMBERT Academic Publishing
• Erscheinungsdatum: 2020
• Sprache: Englisch
• ISBN 10: 6202518774
• ISBN 13: 9786202518772
• Einband: Taschenbuch
• Anzahl der Seiten: 216
• Kontakt zum Hersteller: Nicht verfügbar
• Verantwortliche Person: BOD - Books On Demand GmbH; info@bod.de; ; Überseering 33; Hamburg; 22297; Deutschland