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Plasma-Surface Interactions and Processing of Materials (NATO Science Series E:, Band 176) - Softcover

 
9789401073691: Plasma-Surface Interactions and Processing of Materials (NATO Science Series E:, Band 176)
Softcover
ISBN 10: 9401073694 ISBN 13: 9789401073691
Verlag: Springer, 2011

Inhaltsangabe

An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space.
The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials.
The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.

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Verlag
Springer
Erscheinungsdatum
2011
Sprache
Englisch
ISBN 10 
9401073694
ISBN 13 
9789401073691
Einband
Taschenbuch
Anzahl der Seiten
576
Herausgeber
Auciello O., Gras-Martí Alberto, Valles-Abarca Jose Antonio, Flamm Daniel L.
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