Beispielbild für diese ISBN

Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals and Applications

Karen A. Reinhardt

Verlag: Wiley-Scrivener, 2011
ISBN 10: 0470625953 / ISBN 13: 9780470625958
Gebraucht / Hardcover / Anzahl: 1
Verkäufer Book Deals (Lewiston, NY, USA)
Bei weiteren Verkäufern erhältlich
Alle  Exemplare dieses Buches anzeigen
In den Warenkorb legen
Preis: EUR 167,84
Währung umrechnen
Versand: EUR 0,00
Innerhalb USA
Versandziele, Kosten & Dauer

Für später vormerken

Über dieses Buch

Bibliografische Details


Titel: Handbook for Cleaning for Semiconductor ...

Verlag: Wiley-Scrivener

Erscheinungsdatum: 2011

Einband: Hardcover

Zustand: Used

Beschreibung:

This Book is in Good Condition. Clean Copy With Light Amount of Wear. 100% Guaranteed. Summary: This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. Buchnummer des Verkäufers ABE_book_usedgood_0470625953

Über diesen Titel:

Bewertung (bereitgestellt von GoodReads):
0 durchschnittlich
(0 Bewertungen)

Inhaltsangabe: This comprehensive volume provides an in-depth discussion of the fundamentals of cleaning and surface conditioning of semiconductor applications such as high-k/metal gate cleaning, copper/low-k cleaning, high dose implant stripping, and silicon and SiGe passivation. The theory and fundamental physics associated with wet etching and wet cleaning is reviewed, plus the surface and colloidal aspects of wet processing. Formulation development practices and methodology are presented along with the applications for preventing copper corrosion, cleaning aluminum lines, and other sensitive layers. This is a must-have reference for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing.

From the Reviews...

"This handbook will be a valuable resource for many academic libraries. Many engineering librarians who work with a variety of programs (including, but not limited to Materials Engineering) should include this work in their collection. My recommendation is to add this work to any collection that serves a campus with a materials/manufacturing/electrical/computer engineering programs and campuses with departments of physics and/or chemistry with large graduate-level enrollment."
?Randy Wallace, Department Head, Discovery Park Library, University of North Texas

Klappentext:

Provides an In-depth discussion of surface conditioning for semiconductor applications

The Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications provides an in-depth discussion of surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet processing is reviewed as well as surface and colloidal aspects of cleaning and etching.

Topics covered in this new reference include:

  • Front end line (FEOL) and back end of line (BEOL) cleaning applications such as high-k/metal gate post-etch cleaning and pore sealing, high-dose implant stripping and cleaning, and germanium, and silicon passivation

  • Formulation development practices, methodology and a new directions are presented including chemicals used for preventing corrosion of copper lines, cleaning aluminium lines, reclaiming wafers, and water bonding, as well as the filtering and recirculating of chemicals including reuse and recycling

  • Wetting, cleaning, and drying of features, such as high aspect ratio features and hydrophilic surface states, especially how to dry without watermarks, the abilities to wet hydrophobic surfaces and to remove liquid from deep features

  • The chemical reactions and mechanisms of silicon dioxide etching with hydrofluoric acid, particle removal with ammonium hydroxide/hydrogen peroxide mixture, and metal removal with hydrochloric acid

The Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications is a valuable resource for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. Engineers working for semiconductor manufacturing, capital equipment, chemicals, or other industries that assures cleanliness of chemicals, material, and equipment in the manufacturing area will also find this handbook an indispensible reference.

„Über diesen Titel“ kann sich auf eine andere Ausgabe dieses Titels beziehen.

Anbieter- & Zahlungsinformationen

Zahlungsarten

Dieser Anbieter akzeptiert die folgenden Zahlungsarten:

  • American Express
  • Carte Bleue
  • EuroCard/MasterCard
  • Visa

[Im Angebot des Anbieters suchen]

[Alle Bücher des Anbieters anzeigen]

[Dem Anbieter eine Frage stellen]

Anbieter: Book Deals
Adresse: Lewiston, NY, USA

AbeBooks Verkäufer seit: 7. Mai 2014
Bewertung: 4 Sterne

Geschäftsbedingungen:

We guarantee the condition of every book as it's described on the AbeBooks web
sites. If you're dissatisfied with your purchase (Incorrect Book/Not as
Described/Damaged) or if the order hasn't arrived, you're eligible for a refund
within 30 days of the estimated delivery date. If you've changed your mind
about a book that you've ordered, please use the Ask bookseller a question link
to contact us and we'll respond within 2 business days.


Versandinformationen:

Shipping costs are based on books weighing 2.2 LB, or 1 KG. If your book order is heavy or oversized, we may contact you to let you know extra shipping is required.