Titel: Handbook of VLSI Microlithography: Principles, Technology and Applications
Verlag: William Andrew
Erscheinungsjahr: 1991
Sprache: Englisch
ISBN-10: 0815512813
ISBN-13: 9780815512813
Einband: Hardcover
Zustand: Good
Zustand des Schutzumschlags: No Jacket

�ber diesen Titel

Inhaltsangabe

This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely covered -- including an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.

�ber die Autorin bzw. den Autor

John Helbert is a Senior Member of the Motorola Technical Staff. He earned his doctorate in Physical

��ber diesen Titel� kann sich auf eine andere Ausgabe dieses Titels beziehen.

Anbieterinformationen

ThriftBooks is a fully independent seller of used books, having sold more than 160 million used and new books since we started in 2003. Each quality used book is sorted, graded, shelved and shipped by hand by our team of dedicated employees in our seven warehouses across the US. We have the best selection of books, in the right condition and format, at everyday low prices. We also have a dedicated, US-based Customer Service team, ranked in the top three by Newsweek for Best Customer Service in 2018 and 2019, so you can shop with confidence. We support and invest in our employees, appreciate and value our customers, and truly believe in the power of the written word to educate, energize, and engage readers of all ages and interests.

Zur Homepage des Verk�ufers

Unternehmensdaten des Verk�ufers

Thrift Books Global, LLC
18300 Cascade Ave S, Ste 150, Seattle, WA, 98188, U.S.A.

Gesch�ftsbedingungen und Versandinformationen

Verkaufsbedingungen

We guarantee the condition of every book as it's described
on the Abebooks website. If you're dissatisfied with your
purchase (Incorrect Book/Not as Described/Damaged) or if the
order hasn't arrived, you're eligible for a refund within 30
days of the estimated delivery date. If you've changed your
mind about a book that you've ordered, please use the "Ask
bookseller a question link to contact us" and we'll respond
as soon as possible.

Versandbedingungen

All domestic Standard and Expedited shipments are distributed from our warehouses by OSM, then handed off to the USPS for final delivery.

2-Day Shipping is delivered by FedEx, which does not deliver to PO boxes.

International shipments are tendered to the local postal service in the destination country for final delivery – we do not use courier services for international deliveries.