Interlayer Dielectrics for Semiconductor Technologies. Murarka, S.P., M. Eizenberg and A.K. Sinha

Murarka, S.P., M. Eizenberg and A.K. Sinha

ISBN 10: 0125112211 / ISBN 13: 9780125112215

Verlag: Academic Press, 2004

Interlayer Dielectrics for Semiconductor Technologies. In deutscher Sprache. pages. Bestandsnummer des Verkäufers BN98109

Inhaltsangabe:

Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges.

Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.

Über die Autorin bzw. den Autor: By Shyam P Muraka

Bibliografische Details

Titel: Interlayer Dielectrics for Semiconductor ...
Verlag: Academic Press
Erscheinungsdatum: 2004
Einband: Hardcover
Zustand: gut