Former library book; may include library markings. Used book that is in clean, average condition without any missing pages. Bestandsnummer des Verk�ufers 13331107-6

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Bibliografische Details

Titel: Introduction to Microelectromechanical ...

Verlag: Artech House

Erscheinungsdatum: 1999

Einband: Hardcover

Zustand: Good

Auflage: 2. Auflage

�ber diesen Titel

Inhaltsangabe:

A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

�ber die Autorin bzw. den Autor:

Nadim Maluf is head of research and development at NovaSensor in Fremont, California, and is Consulting Professor of Electrical Engineering at Stanford University.

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