Micro-Electro-Mechanical Systems (MEMS) 1998: Micro-Manuacturing Processes in MEMS and Other Advanced Systems. Applications of Micro-Fabrication to Fluid Mechanics. Micro-Electro-Mechanical Systems. Computational Methods for Analysis, Design and Simulat
IZhang, Xiang, Aluru, Narayan R., Lin, Liwei, Forster, Fred K. (eds.)
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