Microsensors, MEMS and Smart Devices
Gardner, Julian W.; Varadan, Vijay K.; Awadelkarim, Osama O.
ISBN 10: 047186109X ISBN 13: 9780471861096
Verlag: Wiley, 2001
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In. Bestandsnummer des Verkäufers ria9780471861096_new
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Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle.
Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices.
Features include:
* Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods.
* Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines.
* Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin.
* An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology.
* Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field.
Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.
Über die Autorin bzw. den Autor: Julian W. Gardner is the author of Microsensors, MEMS, and Smart Devices, published by Wiley.
Vijay K. Varadan is the author of Microsensors, MEMS, and Smart Devices, published by Wiley.
Osama O. Awadelkarim is the author of Microsensors, MEMS, and Smart Devices, published by Wiley.
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Titel: Microsensors, MEMS and Smart Devices
Verlag: Wiley
Erscheinungsdatum: 2001
Einband: Hardcover
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Gebunden. Zustand: New. Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called system-on-a-chip combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen . Bestandsnummer des Verkäufers 556562680
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Microsensors, MEMS, and Smart Devices (Hardcover)
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ISBN 10: 047186109X
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Hardcover. Zustand: new. Hardcover. Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle. Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices. Features include: * Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods. * Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines. * Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin. * An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology. * Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field. Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field. From the electronic nose and the intelligent ear to the modern ink jet nozzle, the applications of smart devices incorporating microsensors are increasing rapidly. Microsensors are miniature devices that convert a non--electrical quantity into an electrical signal. By integrating a microsensor with a microprocessor, a smart sensor is produced. Shipping may be from our UK warehouse or from our Australian or US warehouses, depending on stock availability. Bestandsnummer des Verkäufers 9780471861096
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