New Approaches to Image Processing Based Failure Analysis of Nano-scale Ulsi Devices

Zalevsky, Zeev/ Livshits, Pavel/ Gur, Eran

ISBN 10: 0323241433 / ISBN 13: 9780323241434

Verlag: William Andrew Pub, 2013

Beschreibung

1st edition. 110 pages. 9.09x6.00x0.25 inches. In Stock.

Bestandsnummer des Verkäufers __0323241433

Bibliografische Details

• Titel: New Approaches to Image Processing Based Failure Analysis of Nano-scale Ulsi Devices
• Verlag: William Andrew Pub
• Erscheinungsjahr: 2013
• Sprache: Englisch
• ISBN-10: 0323241433
• ISBN-13: 9780323241434
• Einband: Hardcover
• Zustand: Brand New

Über diesen Titel

Inhaltsangabe

New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise. This book presents novel "smart" image processing methods, applications, and case studies concerning quality improvement of microscope images of microelectronic chips and process optimization. It explains an approach for high-resolution imaging of advanced metallization for micro- and nanoelectronics. This approach obviates the time-consuming preparation and selection of microscope measurement and sample conditions, enabling not only better electron-microscopic resolution, but also more efficient testing and quality control. This in turn leads to productivity gains in design and development of nano-scale ULSI chips. The authors also present several approaches for super-resolving low-resolution images to improve failure analysis of microelectronic chips.

Über die Autorin bzw. den Autor

Charlotte y Peter Fiell son dos autoridades en historia, teoría y crítica del diseño y han escrito más de sesenta libros sobre la materia, muchos de los cuales se han convertido en éxitos de ventas. También han impartido conferencias y cursos como profesores invitados, han comisariado exposiciones y asesorado a fabricantes, museos, salas de subastas y grandes coleccionistas privados de todo el mundo. Los Fiell han escrito numerosos libros para TASCHEN, entre los que se incluyen 1000 Chairs, Diseño del siglo XX, El diseño industrial de la A a la Z, Scandinavian Design y Diseño del siglo XXI.