PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing

Stephen M. Rossnagel

ISBN 10: 012533026X / ISBN 13: 9780125330268

Verlag: Elsevier Science & Technology, Academic Press, 1999

Beschreibung

nach der Bestellung gedruckt Neuware - Printed after ordering - Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems.In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films.This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts.

Bestandsnummer des Verkäufers 9780125330268

Bibliografische Details

• Titel: PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing
• Verlag: Elsevier Science & Technology, Academic Press
• Erscheinungsjahr: 1999
• Sprache: Englisch
• ISBN-10: 012533026X
• ISBN-13: 9780125330268
• Einband: Buch
• Zustand: Neu

Über diesen Titel

Inhaltsangabe

Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films. This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts.

Über die Autorin bzw. den Autor

Ronald A. Powell. Palo Alto, California. Novellus Systems, Inc., Palo Alto California - Stephen M. Rossnagel. Yorktown Heights, New York. IBM Corporation, T.J. Watson Research Center, Yorktown Heights, New York