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Verlag: Springer, 2014
ISBN 10: 4431547940ISBN 13: 9784431547945
Anbieter: booksXpress, Bayonne, NJ, USA
Buch Print-on-Demand
Soft Cover. Zustand: new. This item is printed on demand.
Verlag: Springer, 2014
ISBN 10: 4431547940ISBN 13: 9784431547945
Anbieter: BMV Bloor, Toronto, ON, Kanada
Buch
Zustand: Very Good. Used - Very Good.
Verlag: Springer, 2014
ISBN 10: 4431547940ISBN 13: 9784431547945
Anbieter: Lucky's Textbooks, Dallas, TX, USA
Buch
Zustand: New.
Verlag: Springer, 2014
ISBN 10: 4431547940ISBN 13: 9784431547945
Anbieter: GreatBookPrices, Columbia, MD, USA
Buch
Zustand: New.
Verlag: Springer, 2014
ISBN 10: 4431547940ISBN 13: 9784431547945
Anbieter: GreatBookPrices, Columbia, MD, USA
Buch
Zustand: As New. Unread book in perfect condition.
Verlag: Springer, 2014
ISBN 10: 4431547940ISBN 13: 9784431547945
Anbieter: Ria Christie Collections, Uxbridge, Vereinigtes Königreich
Buch Print-on-Demand
Zustand: New. PRINT ON DEMAND Book; New; Fast Shipping from the UK. No. book.
Verlag: Springer Japan Feb 2014, 2014
ISBN 10: 4431547940ISBN 13: 9784431547945
Anbieter: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Deutschland
Buch Print-on-Demand
Taschenbuch. Zustand: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -This book provides for the first time a good understanding of the etching profile technologies that do not disturb the plasma. Three types of sensors are introduced: on-wafer UV sensors, on-wafer charge-up sensors and on-wafer sheath-shape sensors in the plasma processing and prediction system of real etching profiles based on monitoring data. Readers are made familiar with these sensors, which can measure real plasma process surface conditions such as defect generations due to UV-irradiation, ion flight direction due to charge-up voltage in high-aspect ratio structures and ion sheath conditions at the plasma/surface interface. The plasma etching profile realistically predicted by a computer simulation based on output data from these sensors is described. 52 pp. Englisch.
Verlag: Springer, 2014
ISBN 10: 4431547940ISBN 13: 9784431547945
Anbieter: Revaluation Books, Exeter, Vereinigtes Königreich
Buch
Paperback. Zustand: Brand New. 2014 edition. 40 pages. 8.75x6.00x0.25 inches. In Stock.
Verlag: Springer, 2014
ISBN 10: 4431547940ISBN 13: 9784431547945
Anbieter: GreatBookPricesUK, Castle Donington, DERBY, Vereinigtes Königreich
Buch
Zustand: New.
Verlag: Springer, 2014
ISBN 10: 4431547940ISBN 13: 9784431547945
Anbieter: GreatBookPricesUK, Castle Donington, DERBY, Vereinigtes Königreich
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Zustand: As New. Unread book in perfect condition.
Verlag: Springer Japan, 2014
ISBN 10: 4431547940ISBN 13: 9784431547945
Anbieter: AHA-BUCH GmbH, Einbeck, Deutschland
Buch
Taschenbuch. Zustand: Neu. Druck auf Anfrage Neuware - Printed after ordering - This book provides for the first time a good understanding of the etching profile technologies that do not disturb the plasma. Three types of sensors are introduced: on-wafer UV sensors, on-wafer charge-up sensors and on-wafer sheath-shape sensors in the plasma processing and prediction system of real etching profiles based on monitoring data. Readers are made familiar with these sensors, which can measure real plasma process surface conditions such as defect generations due to UV-irradiation, ion flight direction due to charge-up voltage in high-aspect ratio structures and ion sheath conditions at the plasma/surface interface. The plasma etching profile realistically predicted by a computer simulation based on output data from these sensors is described.
Verlag: Springer, 2014
ISBN 10: 4431547940ISBN 13: 9784431547945
Anbieter: ALLBOOKS1, Parafield, SA, Australien
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Verlag: Springer Japan, 2014
ISBN 10: 4431547940ISBN 13: 9784431547945
Anbieter: moluna, Greven, Deutschland
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Kartoniert / Broschiert. Zustand: New.
Verlag: Springer, 2014
ISBN 10: 4431547940ISBN 13: 9784431547945
Anbieter: Kennys Bookstore, Olney, MD, USA
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Zustand: New. 2014. Paperback. . . . . . Books ship from the US and Ireland.
Verlag: Springer, 2014
ISBN 10: 4431547940ISBN 13: 9784431547945
Anbieter: Kennys Bookshop and Art Galleries Ltd., Galway, GY, Irland
Buch
Zustand: New. 2014. Paperback. . . . . .