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Verlag: LAP LAMBERT Academic Publishing Mai 2012, 2012
ISBN 10: 3659125474 ISBN 13: 9783659125478
Sprache: Englisch
Anbieter: buchversandmimpf2000, Emtmannsberg, BAYE, Deutschland
Taschenbuch. Zustand: Neu. Neuware -This book is designed as an introduction for the graduate students and researchers who want to understand the trends of MEMS materials and devices. Particularly, this book describes the experimental view of the fabrication of a thin membrane over a conical V-shaped cavity using front side lateral etching technology that proposes a novel front side etching fabrication process for silicon based piezoresistive micro- pressure sensor. As far as the fabrication process is concerned, this technique successfully accomplished a front side etching process laterally to replace the conventional back-side bulk micro-machining. This novel structure of micro pressure sensor can achieve the distinguishing features of the chip size reduction and fabrication costs degradation. This book covers the principles, tools and methods for determining the reliability of micro-electro-mechanical (MEMS)materials, components and devices. Hopefully, this book will be very beneficial to the students of MEMS and NEMS courses.Books on Demand GmbH, Überseering 33, 22297 Hamburg 124 pp. Englisch.
Verlag: LAP LAMBERT Academic Publishing, 2012
ISBN 10: 3659125474 ISBN 13: 9783659125478
Sprache: Englisch
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Taschenbuch. Zustand: Neu. A Hand Book on Fabrication Aspects on MEMS based Pressure Sensors | A Technology of Sensing | Parvej Ahmad Alvi | Taschenbuch | 124 S. | Englisch | 2012 | LAP LAMBERT Academic Publishing | EAN 9783659125478 | Verantwortliche Person für die EU: BoD - Books on Demand, In de Tarpen 42, 22848 Norderstedt, info[at]bod[dot]de | Anbieter: preigu.
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Verlag: LAP LAMBERT Academic Publishing, 2012
ISBN 10: 3659125474 ISBN 13: 9783659125478
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Verlag: LAP LAMBERT Academic Publishing Mai 2012, 2012
ISBN 10: 3659125474 ISBN 13: 9783659125478
Sprache: Englisch
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Taschenbuch. Zustand: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -This book is designed as an introduction for the graduate students and researchers who want to understand the trends of MEMS materials and devices. Particularly, this book describes the experimental view of the fabrication of a thin membrane over a conical V-shaped cavity using front side lateral etching technology that proposes a novel front side etching fabrication process for silicon based piezoresistive micro- pressure sensor. As far as the fabrication process is concerned, this technique successfully accomplished a front side etching process laterally to replace the conventional back-side bulk micro-machining. This novel structure of micro pressure sensor can achieve the distinguishing features of the chip size reduction and fabrication costs degradation. This book covers the principles, tools and methods for determining the reliability of micro-electro-mechanical (MEMS)materials, components and devices. Hopefully, this book will be very beneficial to the students of MEMS and NEMS courses. 124 pp. Englisch.
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Verlag: LAP LAMBERT Academic Publishing, 2012
ISBN 10: 3659125474 ISBN 13: 9783659125478
Sprache: Englisch
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In den WarenkorbZustand: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. Autor/Autorin: Alvi Parvej AhmadDr. Parvej Ahmad Alvi is presently working as a Assistant Professor in Physics Department, Banasthali University(India). His research area is MEMS, Opto-electronics and material science. He has published many Interna.
Verlag: LAP LAMBERT Academic Publishing, 2012
ISBN 10: 3659125474 ISBN 13: 9783659125478
Sprache: Englisch
Anbieter: AHA-BUCH GmbH, Einbeck, Deutschland
Taschenbuch. Zustand: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - This book is designed as an introduction for the graduate students and researchers who want to understand the trends of MEMS materials and devices. Particularly, this book describes the experimental view of the fabrication of a thin membrane over a conical V-shaped cavity using front side lateral etching technology that proposes a novel front side etching fabrication process for silicon based piezoresistive micro- pressure sensor. As far as the fabrication process is concerned, this technique successfully accomplished a front side etching process laterally to replace the conventional back-side bulk micro-machining. This novel structure of micro pressure sensor can achieve the distinguishing features of the chip size reduction and fabrication costs degradation. This book covers the principles, tools and methods for determining the reliability of micro-electro-mechanical (MEMS)materials, components and devices. Hopefully, this book will be very beneficial to the students of MEMS and NEMS courses.
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Buch. Zustand: Neu. MEMS Pressure Sensors | Fabrication and Process Optimization | Parvej Ahmad Alvi | Buch | Gebunden | Englisch | 2014 | IFSA Publishing | EAN 9788461622078 | Verantwortliche Person für die EU: Libri GmbH, Europaallee 1, 36244 Bad Hersfeld, gpsr[at]libri[dot]de | Anbieter: preigu Print on Demand.
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Buch. Zustand: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - MEMS Pressure Sensors: Fabrication and Process Optimization - describs the step by step fabrication process sequence along with flow chart for fabrication of micro pressure sensors taking into account various aspects of fabrication and designing of the pressure sensors as well as fabrication process optimization. A complete experimental detail before and after each step of fabrication of the sensor has also been discussed. This leads to the uniqueness of the book. MEMS Pressure Sensors: Fabrication and Process Optimization will greatly benefit undergraduate and postgraduate students of MEMS and NEMS courses. Process engineers and technologists in the microelectronics industry including MEMS-based sensors manufacturers.