Tribology Issues and Opportunities in MEMS: Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9-11 November 1997 - Hardcover

Hardcover

ISBN 10: 0792350243 ISBN 13: 9780792350248

Verlag: Springer, 1998

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Reseña del editor:

Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the construction ofthese microdevices. These issues are based on surface phenomenaand cannotbe scaled down linearly and these become increasingly important with the small size of the devices. Continuum theory breaks down in the analyses, e. g. in fluid flow of micro-scale devices. Mechanical properties ofpolysilicon and other films are not well characterized. Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.

Reseña del editor:

This volume contains the Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS, held in Columbus, Ohio, USA, 9-11 November, 1997. Micro Electro Mechanical Systems (MEMS) is a rapidly growing industry. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surface chemistry and materials science in the operation and manufacturing of many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to state-of-the-art tribology and vice versa, and this was the specific aim of the workshop.
Better tribological understanding of MEMS will advance the state of the art in micromachining and in the IC industry in general. For example, better understanding will contribute to better performance prediction for micromachined pressure sensors, accelerometers and gyros as well as a better understanding of stiction behaviour of micro-mirrors and micromotors and of the influence of roughness on micro-fluids.
This volume will be of interest to researchers, manufacturers and potential users of MEMS and experts in tribology (including mechanics, mechanical properties and surface modification).

Über diese Auflage

• Verlag: Springer
• Erscheinungsdatum: 1998
• ISBN 10: 0792350243
• ISBN 13: 9780792350248
• Einband: Tapa dura
• Anzahl der Seiten: 676
• Herausgeber: Bhushan Bharat