High k Gate Dielectrics (Series in Materials Science and Engineering) - Softcover

Softcover

ISBN 10: 0367454440 ISBN 13: 9780367454449

Verlag: CRC Press, 2020

Inhaltsangabe

The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be required, making this is a subject of intensive research activity within the microelectronics community.

High k Gate Dielectrics reviews the state-of-the-art in high permittivity gate dielectric research. Consisting of contributions from leading researchers from Europe and the USA, the book first describes the various deposition techniques used for construction of layers at these dimensions. It then considers characterization techniques of the physical, chemical, structural, and electronic properties of these materials. The book also reviews the theoretical work done in the field and concludes with technological applications.

Über diesen Titel

Über die Autorin bzw. den Autor

Michel Houssa Laboratoire Materiaux et Microelectronique de Provence, Universite de Provence, France Silicon Processing and Device Technology Division, IMEC, Belgium

Details zur Ausgabe

• Verlag: CRC Press
• Erscheinungsdatum: 2020
• Sprache: Englisch
• ISBN 10: 0367454440
• ISBN 13: 9780367454449
• Einband: Taschenbuch
• Anzahl der Seiten: 614
• Herausgeber: Houssa Michel
• Kontakt zum Hersteller: Nicht verfügbar
• Verantwortliche Person: Buchbär; info@buchbaer.de; ; Weberstr. 67; Osnabrück; 49084; Deutschland