A User's Guide to Ellipsometry (Dover Civil and Mechanical Engineering) - Softcover

Buch 37 von 53: Dover Civil and Mechanical Engineering

Tompkins, Harland G.

 
9780486450285: A User's Guide to Ellipsometry (Dover Civil and Mechanical Engineering)
Softcover
ISBN 10: 0486450287 ISBN 13: 9780486450285
Verlag: Dover Publications Inc., 2006

Inhaltsangabe

This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry — particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.
A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.

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Verlag
Dover Publications Inc.
Erscheinungsdatum
2006
Sprache
Englisch
ISBN 10 
0486450287
ISBN 13 
9780486450285
Einband
Taschenbuch
Anzahl der Seiten
272
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Soc. Agr. La Raia Ss
http://www.la-raia.it

Strada Monterotondo, 79
Novi Ligure
15067
Italien

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