Scanning Electron Microscopy: Physics of Image Formation and Microanalysis - Hardcover
Buch 55 von 234: Springer Series in Optical Sciences
Inhaltsangabe
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
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