CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY (HB 1998)

SEILER D. G.

ISBN 10: 1563967537 / ISBN 13: 9781563967535

Verlag: SPRINGER, 1998

Brand New! Fast Delivery This is an International Edition and ship within 24-48 hours. Deliver by FedEx and Dhl, & Aramex, UPS, & USPS and we do accept APO and PO BOX Addresses. Order can be delivered worldwide within 6-10 days and we do have flat rate for up to 2LB. Extra shipping charges will be requested if the Book weight is more than 5 LB. This Item May be shipped from India, United states & United Kingdom. Depending on your location and availability. Bestandsnummer des Verkäufers CBS 9781563967535

Inhaltsangabe:

The proceedings of the 1998 International Conference on Characterization and Metrology for ULSI Technology was dedicated to summarizing major issues and giving critical reviews of important semiconductor techniques that are crucial to continue the advances in semiconductor technology. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing. This is the only book that we know of that emphasizes the science and technology of semiconductor characterization in the factory environment. The increasing importance of monitoring and controlling semiconductor processes make it particularly timely.

Bibliografische Details

Titel: CHARACTERIZATION AND METROLOGY FOR ULSI ...
Verlag: SPRINGER
Erscheinungsdatum: 1998
Einband: Hardcover
Zustand: New
Auflage: Internationale Ausgabe