Characterization and Metrology for ULSI Technology 2005 (AIP Conference Proceedings, 788)

ISBN 10: 0735402779 / ISBN 13: 9780735402775

Verlag: American Institute of Physics, 2005

Beschreibung

Supports Goodwill of Silicon Valley job training programs. The cover and pages are in Acceptable condition! Any other included accessories are also in Acceptable condition showing use. Use can include some highlighting and writing, page and cover creases as well as other types visible wear such as cover tears discoloration, staining, marks, scuffs, etc. All pages intact.

Bestandsnummer des Verkäufers GWSVV.0735402779.A

Bibliografische Details

• Titel: Characterization and Metrology for ULSI Technology 2005 (AIP Conference Proceedings, 788)
• Verlag: American Institute of Physics
• Erscheinungsjahr: 2005
• Sprache: Englisch
• ISBN-10: 0735402779
• ISBN-13: 9780735402775
• Einband: Hardcover
• Zustand: acceptable

Über diesen Titel

Inhaltsangabe

The worldwide semiconductor community faces increasingly difficult challenges in the era of silicon nanotechnology and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed. Characterization and metrology are key enablers for developing new semiconductor technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continuing the advances in semiconductor technology. It covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. The book also covers emerging nano-devices and the corresponding metrology challenges that arise.