Measurement Technology for Micro-Nanometer Devices

Zhang, Wendong; Chou, Xiujian; Shi, Tielin; Ma, Zongmin; Bao, Haifei; Chen, Jingdong; Chen, Liguo; Li, Dachao; Xue, Chenyang

ISBN 10: 1118717961 / ISBN 13: 9781118717967

Verlag: John Wiley & Sons, 2017

Beschreibung

pp. 352. Bestandsnummer des Verkäufers 373296097

Bibliografische Details

Titel: Measurement Technology for Micro-Nanometer ...

Verlag: John Wiley & Sons

Erscheinungsdatum: 2017

Einband: Hardcover

Zustand: New

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Inhaltsangabe:

A FULLY COMPREHENSIVE EXAMINATION OF STATE–OF–THE–ART TECHNOLOGIES FOR MEASUREMENT AT THE SMALL SCALE HIGHLIGHTS THE ADVANCED RESEARCH WORK FROM INDUSTRY AND ACADEMIA IN MICRO–NANO DEVICES TEST TECHNOLOGY WRITTEN AT BOTH INTRODUCTORY AND ADVANCED LEVELS, PROVIDES THE FUNDAMENTALS AND THEORIES FOCUSES ON THE MEASUREMENT TECHNIQUES FOR CHARACTERIZING MEMS/NEMS DEVICES