Measurement Technology for Micro-Nanometer Devices

Zhang, Wendong, Chou, Xiujian, Shi, Tielin, Ma, Zongmin, Bao

ISBN 10: 1118717961 / ISBN 13: 9781118717967

Verlag: Wiley, 2017

Beschreibung

New. Bestandsnummer des Verkäufers D7F7-3-M-1118717961-6

Bibliografische Details

Titel: Measurement Technology for Micro-Nanometer ...

Verlag: Wiley

Erscheinungsdatum: 2017

Einband: Hardcover

Zustand: New

Art des Buches: book

Über diesen Titel

Inhaltsangabe:

A FULLY COMPREHENSIVE EXAMINATION OF STATE–OF–THE–ART TECHNOLOGIES FOR MEASUREMENT AT THE SMALL SCALE HIGHLIGHTS THE ADVANCED RESEARCH WORK FROM INDUSTRY AND ACADEMIA IN MICRO–NANO DEVICES TEST TECHNOLOGY WRITTEN AT BOTH INTRODUCTORY AND ADVANCED LEVELS, PROVIDES THE FUNDAMENTALS AND THEORIES FOCUSES ON THE MEASUREMENT TECHNIQUES FOR CHARACTERIZING MEMS/NEMS DEVICES