James k olthoff (109 Ergebnisse)

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Hardback. Zustand: New. Loucas G. Christophorou and James K. Olthoff examine how low-energy electrons collide with gas molecules used in plasma etching, with particular attention to the semiconductor industry. The six chapters move from general principles to data on individual gases. The first sets out the basic electron-molecule interactions and why they matter to technology. The second defines the cross sections and coefficients used to describe these collisions, in the gas phase, and the third explains how the authors evaluated and assessed the published data. The remaining chapters give recommended or suggested cross sections, together with rate and transport coefficients, for ten gases: CF4, C2F6 and C3F8; then CHF3, CF3I and c-C4F8; and finally Cl2, CCl2F2, BCl3 and SF6. Feel free to ask for photos or more detail.…

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Taschenbuch. Zustand: Neu. Druck auf Anfrage Neuware - Printed after ordering - The Tenth International Symposium on Gaseous Dielectrics was held at the Astir Palace Vouliagmeni Hotel, Athens, Greece, March 29-April 2, 2004. The symposium. continued the interdisciplinary character and comprehensive approach of the preceding nine symposia. Gaseous Dielectrics X is a detailed record of the symposium proceedings. It covers recent advances and developments in a wide range of basic, applied, and industrial areas of gaseous dielectrics. It is hoped that Gaseous Dielectrics X will aid future research and development in, and encourage wider industrial use of, gaseous dielectrics. The Organizing Committee of the Tenth International Symposium on Gaseous Dielectrics consisted of L. G. Christophorou (Chainnan, Greece), J. K. Olthoff (co-Chainnan, USA), A. Bulinski (Canada), A. H. Cookson (USA), C. T. Dervos (Greece), J. de Urquijo (Mexico), J. Blackman (USA), O. Farish (UK), M. E. Frechette (Canada), I. Gillimberti (Italy), A. Garscadden (USA), A. Gleizes (France), H. Hama (Japan), T. Kawamura (Japan), E. Marode (France), I. W. McAllister (Denmark), H. Morrison (Canada), A. H. Mufti (Saudi Arabia), L. Niemeyer (Switzerland), W. Pfeiffer (Germany), Y. Qiu (China), I. Sauers (USA), M. Schmidt (Germany), H.-H. Schramm (Germany), L. van der Zel (USA), S. Yanabu (Japan), Y. Wang (USA), and J. W. Wetzer (The Netherlands). The Local Arrangements Committee consisted of J. N. Avaritsiotis, P. Vassiliou, C. T. Dervos of The National Technical University of Athens, C. A. Stassinopoulos of the Aristotelian University of Thessaloniki, and D.…

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Taschenbuch. Zustand: Neu. Gaseous Dielectrics X | Loucas C. Christophorou (u. a.) | Taschenbuch | xiii | Englisch | 2012 | Springer US | EAN 9781461347453 | Verantwortliche Person für die EU: Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg, juergen[dot]hartmann[at]springer[dot]com | Anbieter: preigu.…

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Buch. Zustand: Neu. Neuware - The Tenth International Symposium on Gaseous Dielectrics was held at the Astir Palace Vouliagmeni Hotel, Athens, Greece, March 29-April 2, 2004. The symposium. continued the interdisciplinary character and comprehensive approach of the preceding nine symposia. Gaseous Dielectrics X is a detailed record of the symposium proceedings. It covers recent advances and developments in a wide range of basic, applied, and industrial areas of gaseous dielectrics. It is hoped that Gaseous Dielectrics X will aid future research and development in, and encourage wider industrial use of, gaseous dielectrics. The Organizing Committee of the Tenth International Symposium on Gaseous Dielectrics consisted of L. G. Christophorou (Chainnan, Greece), J. K. Olthoff (co-Chainnan, USA), A. Bulinski (Canada), A. H. Cookson (USA), C. T. Dervos (Greece), J. de Urquijo (Mexico), J. Blackman (USA), O. Farish (UK), M. E. Frechette (Canada), I. Gillimberti (Italy), A. Garscadden (USA), A. Gleizes (France), H. Hama (Japan), T. Kawamura (Japan), E. Marode (France), I. W. McAllister (Denmark), H. Morrison (Canada), A. H. Mufti (Saudi Arabia), L. Niemeyer (Switzerland), W. Pfeiffer (Germany), Y. Qiu (China), I. Sauers (USA), M. Schmidt (Germany), H.-H. Schramm (Germany), L. van der Zel (USA), S. Yanabu (Japan), Y. Wang (USA), and J. W. Wetzer (The Netherlands). The Local Arrangements Committee consisted of J. N. Avaritsiotis, P. Vassiliou, C. T. Dervos of The National Technical University of Athens, C. A. Stassinopoulos of the Aristotelian University of Thessaloniki, and D.…